스퍼터링 타겟(Sputtering Targets)
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Oxide Target
Material Formula Standard Purities,
%
Theoretical Density,
g/㎤
Melting Point,
Fabrication Method Applications
Aluminum oxide Al2O3 99.99 3.99 2045 Hot-pressed Protection of aluminum mirrors. High temperature dielectric.
Antimony oxide Sb2O3 99.9 5.20 655 Hot-pressed Dielectric interference filter for ultra-violet radiation; use with cryolite.
Barium titanate BaTiO3 99.9
99.6
6.06 1612 Hot-pressed Thin-film capacitor.
Bismuth oxide Bi2O3 99.9 8.9 820 Hot-pressed Beam splitter.
Bismuth titanate Bi2Ti4O11 99.9 6.09 900 Hot-pressed Dielectric thin film. For metallizing paper, etc.Beam splitter. Base coating for gold films for heating elements on glass.
Bismuth titanate Bi4Ti3O12 8.11
Cerium oxide CeO2 99.9 7.30 1950 Hot-pressed High index film; multilayer; anti-reflection coating.
Chromium oxide Cr2O3 99.8 5.21 2000 Hot-pressed Absorbent brown film with medium index.
Europium-doped yttrium vanadate YVO3-xEu2O3 99.9 varies varies Hot-pressed Phosphorescent coating on special currency papers.
Gallium oxide Ga2O3 99.999 5.88 1900 Hot-pressed Dielectric film.
Germanium oxide GeO2 4.23 1115
Hafnium oxide
(unstabilized)
HfO2 99.95 9.68 2790 Hot-pressed Dielectric coating. Very hard, adherent film.
Hafnium oxide
(stabilized)
HfO2—10-15
wt. % CaO
99.0 varies varies
Hafnium oxide
(stabilized)
HfO2—10-15
wt. % Y2O3
Indium oxide In2O3 99.999
99.99
7.18 2000 Hot-pressed Transparent conductive films in electro-optical displays of the liquid crystal, electro-luminescent and gas discharge types.
Indium oxide-
tin oxide
xIn2O3 -
ySnO2
varies varies
Iron oxide Fe2O3 99.99
99.9
5.25 1565 Hot-pressed Beam splitter and interference layers. Magnetic films.
Fe3O4 99.5 5.18 1594
Lanthanum oxide La2O3 99.99 6.6 2250 Hot-pressed Thin film capacitors. Possible uses in PLZT devices. (Very moisture sensitive.)
Lead titanate PbTiO3 99.9 7.52 - Hot-pressed Thin film capacitors.
Lead zirconate PbZrO3 99.7 7.81 -
Lithium niobate LiNbO3 99.9 4.64 1253 Hot-pressed Piezoelectrics.
Lutetium iron
oxide (garnet)
 Lu3Fe5O12 99.9 7.15 - Hot-pressed Bubble memory devices.
Magnesium oxide MgO 99.99
99.5
3.58 2802 Hot-pressed High tempature dielectric.
Molybdenum oxide MoO3 99.99 4.69 795 Hot-pressed Luminescent coatings.
Niobium oxide Nb2O5 99.95 4.47 1460 Hot-pressed Dielectric coating. Multilayers.
Rare earth garnets Ln3M5O12 99.9 varies varies Hot-pressed Bubble memory devices.
Rare earth oxides varies 99.999, 99.99
99.9
varies varies Hot-pressed Possible dielectric coatings.
Silicon dioxide SiO2 99.995
99.97
2.21 1713 Hot-pressed Hard durable film with low index. Insulating layer.
Silicon monoxide SiO 99.99
99.9
2.13 1700 Hot-pressed Protective film for front surface aluminized mirrors. Low index layer for infrared filters.
Strontium titanate SrTiO3 99.9 4.15 2040 Hot-pressed Thin film capacitors.
Strontium zirconate SrZrO3 99.0 5.48 -
Tantalum oxide Ta2O5 99.95 7.53 1880 Hot-pressed Dielectric film. Multilayers.
Thorium oxide ThO2 99.99 9.86 2100 Hot-pressed RADIOACTIVE. Highly durable beam splitter.
Tin oxide SnO2 99.9 6.85 1930 Hot-pressed Transparent conductive film. Also in varistors.
Titanium oxide TiO2 99.995
99.9
4.24 1855 Hot-pressed High index film, multilayer interference filters.
Tungsten oxide WO3 99.99 7.16 1473 Hot-pressed Shadow casting for electron microscopy.
Yttrium aluminum
oxide (YAG)
Y3Al5O12 99.9 4.55 1950 Hot-pressed Bubble memory devices.
Yttrium iron
oxide (garnet)
Y3Fe5O12 99.99
99.9
5.10 1575 Hot-pressed Ferromagnetic films. Bubble memory devices.
Yttrium oxide Y2O3 99.999
99.99, 99.9
4.84 2400 Hot-pressed Hard film. Dielectric coating. Thin film capacitor.
Zinc oxide ZnO 99.999
99.9
5.66 1975 Hot-pressed Dielectric, in varistors, in gas sensors.
Zirconium oxide
(unstabilized)
ZrO2 99.7 5.56 2687 Hot-pressed Multilayers. Dielectric coating. Adherent coating with high refractive index.
Zirconium oxide
(stabilized)
ZrO2—5-15
wt. % CaO
99.0 varies varies
ZrO2—10-15
wt. % Y2O3